JPH0295232U - - Google Patents
Info
- Publication number
- JPH0295232U JPH0295232U JP398389U JP398389U JPH0295232U JP H0295232 U JPH0295232 U JP H0295232U JP 398389 U JP398389 U JP 398389U JP 398389 U JP398389 U JP 398389U JP H0295232 U JPH0295232 U JP H0295232U
- Authority
- JP
- Japan
- Prior art keywords
- lower cup
- cup
- spin chuck
- wafer
- skirt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398389U JPH0295232U (en]) | 1989-01-18 | 1989-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP398389U JPH0295232U (en]) | 1989-01-18 | 1989-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0295232U true JPH0295232U (en]) | 1990-07-30 |
Family
ID=31206098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP398389U Pending JPH0295232U (en]) | 1989-01-18 | 1989-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0295232U (en]) |
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1989
- 1989-01-18 JP JP398389U patent/JPH0295232U/ja active Pending